| System parameters: |
| 1. Measuring method: single frequency |
| 2. Laser frequency accuracy: 0.05ppm |
| 3. Dynamic capture rate: 50kHz |
| 4. Warm-up time: about 6 min |
| 5. Operating temperature: (0-40)℃ |
| 6. Environment temperature: (0-40)℃, humidity: 0-95% |
| 7. Storage temperature: -20℃-70℃ |
| Environmental sensors: |
| 1. Atmospheric temperature sensor : ±0.1℃ (0-40)℃, resolution: 0.01℃ |
| 2. Material temperature sensor: ±0.1℃ (0-40)℃, resolution: 0.01℃ |
| 3. Atmospheric humidity sensor: ±5% (0-95%) |
| 4. Atmospheric pressure sensor: ±0.1kPa (65～115)kPa |
| Linear measurement: |
| 1. Measuring range: (0-80)m |
| 2. Measuring accuracy: 0.5ppm (0-40)℃ |
| 3. Measuring resolution: 1nm |
| 4. Maximum measuring speed: 4m/s |
| Angle measurement: |
| 1. Axial range: (0-15)m |
| 2. Measuring range: ±10° |
| 3. Accuracy: ±(0.02%R+0.1+0.24M)″ (R is indicating value, unit: ″; M is measured length in m) |
| 4. Measuring resolution: 0.1″ |
| Flatness measurement: |
| 1. Axial range: (0-15) m |
| 2. Flatness measuring range: ±1.5 mm |
| 3. Accuracy: ±(0.2%R+0.02M2) μm (R is indicating value in μm; M is measured length in m) |
| 4. Substrate size: 180mm adjustable, 360mm adjustable |
| 5. Measuring resolution: 0.1μm |
| Straightness measurement: |
| Item |
Axis range |
Measuring range |
Accuracy |
Resolution |
| Short straightness |
(0.1-4)m |
±3.0mm |
±(0.5+0.25%R+0.15M2)μm |
0.01μm |
| Long straightness |
(1-20)m |
±3.0mm |
±(5.0+2.5%R+0.015M2)μm |
0.1μm |
| Note: R is indicating value in μm; M is measured length in meters |
| Perpendicularity measurement: |
| Item |
Axis range |
Measuring range |
Accuracy |
Resolution |
| Short perpendicularity |
(0.1-3)m |
±3.0mm |
±(2.5+0.25%R+0.8M)μm/m |
0.01μm |
| Long perpendicularity |
(1-15)m |
±3.0mm |
±(2.5+2.5%R+0.08M)μm/m |
0.01μm |
| Note: R is indicating value in μm; M is measured length in meters |
| Rotary axis measurement: |
| 1. Measuring range of angle: 0-360° |
| 2. Max axis rotation speed: 10rpm |
| 3. Pitch accuracy of precision turntable: ±1″ |
| 4. Resolution: 0.1″ |
